photolithography
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Nanotechnology
Engineers develop first deep-UV microLED display chip for maskless photolithography
Electroluminescence (EL) images show that devices of various sizes operate effectively at operating current densities, even the smallest 3 μm devices. UVC microdisplays provide excellent uniformity and significant light output, allowing successful implementation of pattern transfer processes. Credit: HKUST In a breakthrough initiative that will revolutionize the semiconductor industry, the Hong Kong University of Science and Technology (HKUST) School of…
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Physics
New deep-UV micro-LED array advances maskless photolithography
Schematic diagram of a self-stabilizing light emitting system built with vertically integrated devices. Credit: Professor Sun’s team A team led by Professor Sun Haiding from the University of Science and Technology of China (USTC) has developed a vertically integrated microscale light emitting diode (micro-LED) array and applied it to a deep ultraviolet (DUV) maskless photolithography system. first time. Their research…
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