maskless
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Physics
New deep-UV micro-LED array advances maskless photolithography
Schematic diagram of a self-stabilizing light emitting system built with vertically integrated devices. Credit: Professor Sun’s team A team led by Professor Sun Haiding from the University of Science and Technology of China (USTC) has developed a vertically integrated microscale light emitting diode (micro-LED) array and applied it to a deep ultraviolet (DUV) maskless photolithography system. first time. Their research…
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